Substrate transfer apparatus and substrate transfer method

Abstract

A substrate transfer arm includes: a support including an upper surface that faces a substrate and is configured to support the substrate, and a conductive surface that is connected to a ground portion having a ground potential; a conductive pad provided on the upper surface of the support, and configured to support the substrate in contact with a lower surface of the substrate in such a way that the substrate is not brought into contact with the support; and a conductive portion configured to connect the conductive pad and the surface of the support. The conductive portion is located below the upper surface of the conductive pad contacting the substrate and is connected to the conductive pad.

Dependencies are inferred from the claim text.