Dual-valve automatic calibration system and dual-valve automatic calibration method
AssigneeKulicke and Soffa Hi-Tech Co., Ltd.
InventorsLu-Min Chen, Tsung-Lin Tsai
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AssigneeKulicke and Soffa Hi-Tech Co., Ltd.
InventorsLu-Min Chen, Tsung-Lin Tsai
Estimating the term…
A dual-valve automatic calibration system comprises a primary positioner, a first secondary positioner and a second secondary positioner: the first secondary positioner and the second secondary positioner are connected with a first fluid coating unit and a second fluid coating unit, respectively; the primary positioner comprises a primary X-axis positioner and a primary Y-axis positioner; both the first secondary positioner and the second secondary positioner are connected with the primary X-axis positioner. In contrast to the prior art that a secondary positioner is installed on a primary Z-axis positioner, a dual-valve automatic calibration system contributes to promotion of positioning precision on the Z-axis and reduction of a burden imposed on the Z-axis.
A dual-valve automatic calibration method, comprising:
Dependencies are inferred from the claim text.