Slot die coating apparatus and the coating method thereof
AssigneePrologium Technology Co., Ltd.
InventorsChia-Ming LIN, Szu-Nan YANG, Chia-Chi HUANG
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AssigneePrologium Technology Co., Ltd.
InventorsChia-Ming LIN, Szu-Nan YANG, Chia-Chi HUANG
Estimating the term…
The invention provides a slot die coating apparatus and the coating method thereof. The flow path is divided into a first flow path and a second flow path by the shim group. The first flow path is utilized to coat from the middle portion of the coating nozzle and the second flow path is utilized to coat from the two sides of the coating nozzle. The nozzle lips at the two sides of the slot die coating apparatus are extended to close the substrate to prevent to hit the obstacle of the substrate during coating. Also, the height for coating of the slot die coating apparatus is controllable to achieve the optimized coating.
A slot die coating apparatus, adapted for coating on a substrate, comprising:
A slot die coating method, comprising the steps of:
Dependencies are inferred from the claim text.