Droplet jet nozzle design
AssigneeApplied Materials, Inc.
InventorsManikandan JAYARAMAN, Jagadeesh Kumar SUKUMARAN, Jagan RANGARAJAN, Ekaterina A. MIKHAYLICHENKO, Yunshuang DING, Yuwen HUANG, Timothy THAO
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsManikandan JAYARAMAN, Jagadeesh Kumar SUKUMARAN, Jagan RANGARAJAN, Ekaterina A. MIKHAYLICHENKO, Yunshuang DING, Yuwen HUANG, Timothy THAO
Estimating the term…
In one embodiment, a nozzle assembly includes a body with an internal surface forming an internal cavity within the body. The assembly also includes a gas inlet disposed within the body, a fluid inlet disposed within the body and a mixing chamber disposed within the internal cavity of the body, such that an annular gap is formed between the internal surface and an exterior surface of the mixing chamber, the mixing chamber may include: a mixing body region within the mixing chamber; one or more gas ports fluidly connecting the gas inlet to the mixing chamber, the gas ports tangentially aligned with an interior surface of the mixing chamber; a fluid port in fluid communication with the fluid inlet of the body and the mixing body region of the mixing chamber; and an outlet in fluid communication with the mixing body region configured to deliver a fluid mixture.
A nozzle assembly, comprising:
A nozzle assembly, comprising:
A nozzle assembly, comprising:
Dependencies are inferred from the claim text.