Inlet assembly
OwnerAaron Bowen, Andrew James Seeleyinventors
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OwnerAaron Bowen, Andrew James Seeleyinventors
Estimating the term…
An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.
An inlet assembly for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, said inlet assembly comprising:
A method, comprising:
Dependencies are inferred from the claim text.