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US 2024/0383097 A1Published application
Polishing pad
AssigneeKuraray Co., Ltd.
InventorsYuko GOSHI, Mitsuru KATO, Takashi SUGIOKA
Life of this patent
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Abstract
Disclosed is a polishing pad including a polishing layer that is a molded body of a polyurethane composition, wherein the polyurethane composition contains 90 to 99.9 mass % of a thermoplastic polyurethane including a non-alicyclic diisocyanate unit as an organic diisocyanate unit, and 0.1 to 10 mass % of a hygroscopic polymer, and the molded body has a hardness of 60 or more and less than 75, as measured with a type-D durometer compliant with JIS K 7215.
Claims19
1:
- A polishing pad comprising a polishing layer that is a molded body of a polyurethane composition,
- wherein the polyurethane composition contains 90 to 99.9 mass % of a thermoplastic polyurethane including a non-alicyclic diisocyanate unit as an organic diisocyanate unit, and 0.1 to 10 mass % of a hygroscopic polymer having a moisture absorption rate of 0.1% or more, and
- the molded body has a D hardness of 60 or more and less than 75, as measured with a type-D durometer compliant with JIS K 7215 for a load holding time of 5 seconds.
2:
- The polishing pad according to claim 1, wherein the thermoplastic polyurethane includes, in a total amount of the organic diisocyanate unit, 90 to 100 mol % of 4,4′-diphenylmethane diisocyanate unit serving as the non-alicyclic diisocyanate unit.
3:
- The polishing pad according to claim 1, wherein the polyurethane composition contains 99 to 99.9 mass % of the thermoplastic polyurethane, and 0.1 to 1 mass % of the hygroscopic polymer.
4:
- The polishing pad according to claim 1, wherein the hygroscopic polymer includes at least one selected from the group consisting of a polyethylene oxide (PEO), a polypropylene oxide (PPO), a PEO-PPO copolymer, a PEO-PPO block copolymer, and a polyester-based thermoplastic elastomer (TPEE).
5:
- The polishing pad according to claim 1, wherein the hygroscopic polymer has a weight-average molecular weight of 70,000 to 4,000,000.
6:
- The polishing pad according to claim 1, wherein the molded body has a saturated swollen state-breaking elongation of 250 to 400% when swollen to saturation with water at 50° C.
7:
- The polishing pad according to claim 6, wherein the molded body has a dry state-breaking elongation of 150 to 250% at a humidity of 48 RH % and 23° C.
8:
- The polishing pad according to claim 7, wherein the molded body has a ratio S1/S2 of 1.0 to 2.0, where S1 represents the saturated swollen state-breaking elongation and S2 represents the dry state-breaking elongation.
9:
- The polishing pad according to claim 1, wherein the molded body, in a form of a sheet having a thickness of 0.5 mm, has a laser light transmittance of 60% or more for 550-nm wavelength when swollen to saturation with water at 50° C.
10:
- The polishing pad according to claim 1, wherein the molded body has a Vickers hardness of 5 or more and less than 21.
11:
- The polishing pad according to claim 1, wherein the molded body has a storage modulus of 0.1 to 1.0 GPa when swollen to saturation with water at 50° C.
12:
- The polishing pad according to claim 1, wherein the molded body is an unfoamed molded body.
13:
- The polishing pad according to claim 1, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 90 to 100 mol %.
14:
- The polishing pad according to claim 4, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 90 to 100 mol %.
15:
- The polishing pad according to claim 1, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 95 to 100 mol %.
16:
- The polishing pad according to claim 4, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 95 to 100 mol %.
17:
- The polishing pad according to claim 1, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 100 mol %.
18:
- The polishing pad according to claim 4, wherein a content ratio of the non-alicyclic diisocyanate unit contained in a total amount of the organic diisocyanate units contained in the thermoplastic polyurethane is 100 mol %.
19:
- The polishing pad according to claim 1, wherein the hygroscopic polymer has a weight-average molecular weight of 5,000 to 10,000,000.