Resist composition, resist pattern forming method, compound, and acid diffusion control agent
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorTakuya Uehara
Life of this patent
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorTakuya Uehara
Estimating the term…
A resist composition containing a base material component (A) and a compound represented by General Formula (d0), in which Rd0 represents a condensed cyclic group in which an aromatic ring and an alicyclic ring are condensed, the alicyclic ring in the condensed cyclic group has a substituent, at least one of the substituents includes a hydrocarbon group having a bromine atom or a hydrocarbon group having an iodine atom, Yd0 represents a divalent linking group or a single bond, Yd0 is bonded to the alicyclic ring in the condensed cyclic group, Mm+ represents an m-valent organic cation, m represents an integer of 1 or more
A resist composition that generates an acid upon exposure and exhibits changed solubility in a developing solution under an action of the acid, the resist composition comprising:
A compound represented by General Formula (d0),
Dependencies are inferred from the claim text.