Cryopump system and regeneration controller

A regeneration controller for a cryopump system,

• wherein the cryopump system includes:
• a plurality of cryopumps, each of which includes a cryopump container, an exhaust valve that exhausts an exhaust fluid from the cryopump container, and an exhaust purge valve that supplies a purge gas to the exhaust valve or downstream thereof, and
• an exhaust line through which the exhaust fluid is exhausted from the plurality of cryopumps to a treatment device, the exhaust line including a plurality of branch lines and a merging line, the plurality of branch lines each connected to the exhaust valve and the exhaust purge valve of a corresponding cryopump, the merging line connecting the plurality of branch lines to the treatment device,
• the plurality of cryopumps include a first cryopump and a second cryopump, and
• the regeneration controller is configured to control the first cryopump so that the exhaust fluid is exhausted from the first cryopump to the treatment device and concurrently to control the second cryopump so that the purge gas is supplied from the second cryopump to the merging line of the exhaust line.