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US 2024/0368748 A1Published application
Method for manufacturing hard coat-forming target
AssigneeProterial, Ltd.
InventorsTATSUYA SHOUJI, FUMIAKI HONDA
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Abstract
A method for manufacturing a hard coat-forming target includes using V powder and M powder to obtain a target composed of (V1-aMa). M is at least one selected from Mo and W. An atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less. A particle diameter of the M powder is smaller than a particle diameter of the V powder.
Claims1
A method for manufacturing a hard coat-forming target, comprising:
- using V powder and M powder to obtain a target composed of (V1-aMa), wherein
- M is at least one selected from Mo and W,
- an atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less, and
- a particle diameter of the M powder is smaller than a particle diameter of the V powder.
1 more element
Dependencies are inferred from the claim text.