Method and system for bonding high fluence optics to optomechanical assemblies
AssigneeKLA Corporation
InventorMandar Anand Paranjape
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AssigneeKLA Corporation
InventorMandar Anand Paranjape
Estimating the term…
A method for binding a first optical element to a substrate is disclosed. The method may include receiving a first optical element and a substrate. The method may include positioning an indium foil between the first optical element and the substrate. The method may include securing the first optical element to the substrate to produce a pre-bonded assembly, wherein the indium foil is disposed between the first optical element and the substrate. The method may include heating the pre-bonded assembly above a melting temperature of the indium foil. The method may include cooling the pre-bonded assembly. The method may include releasing the pre-bonded assembly, wherein releasing the pre-bonded assembly releases a bonded structure.
A method for binding a first optical element to a substrate comprising:
A system for bonding a first optical element to a substrate comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.