Methods of forming a temperature compensated dielectric material
AssigneeSkyworks Solutions, Inc.
InventorMichael David Hill
Life of this patent
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Abstract
Disclosed are methods of forming a dielectric material. One method comprises modifying a tungsten bronze crystal structure by substituting one or more lattice sites with one or more elements selected to increase a quality factor (Q) of the dielectric material.
Claims20
A method of forming a dielectric material, the method comprising modifying a Ba—Sm—Ti—Ta—O tungsten bronze crystal structure by substituting one or more lattice sites with one or more elements selected to increase a quality factor (Q) of the dielectric material, the dielectric material thereby having a dielectric constant of at least 60 and a temperature coefficient of resonant frequency of less than 15.
A method of forming a dielectric material having a composition Ba12.45Sm27.65Ti53.55Ta0.45O162 and including a tungsten bronze crystal structure, the method comprising modifying the tungsten bronze crystal structure by substituting one or more lattice sites with one or more elements selected to increase a quality factor (Q) of the dielectric material, the dielectric material thereby having a dielectric constant of at least 60 and a temperature coefficient of resonant frequency of less than 15.
A method of forming a dielectric material having a composition Ba12.15Sm27.75Ti53.55Ta0.45O162 and including a tungsten bronze crystal structure, the method comprising modifying the tungsten bronze crystal structure by substituting one or more lattice sites with one or more elements selected to increase a quality factor (Q) of the dielectric material, the dielectric material thereby having a dielectric constant of at least 60 and a temperature coefficient of resonant frequency of less than 15.
Dependencies are inferred from the claim text.