Infrared processing device
AssigneeNGK Insulators, Ltd.
InventorMichiro AOKI
Life of this patent
Estimating the term…
Loading patent…
AssigneeNGK Insulators, Ltd.
InventorMichiro AOKI
Estimating the term…
An infrared processing device includes an infrared heater including a heating body and a metamaterial structure capable of, when thermal energy is input from the heating body, radiating infrared rays which have a maximum peak of a non-Planck distribution and whose maximum peak has a peak wavelength of 2 μm or more and 7 μm or less; an inner tube that surrounds the infrared heater, contains at least one of a fluorine-based material having a C—F bond and calcium fluoride, and transmits infrared rays of the peak wavelength; and an outer tube that surrounds the inner tube and forms, between the inner tube and the outer tube, an object channel through which a processing object is allowed to flow.
An infrared processing method, comprising:
Dependencies are inferred from the claim text.