Orifice driven hydroxyl combustion oxidation
AssigneeApplied Materials, Inc.
InventorsChristopher S. OLSEN, Sameh HELMY, Hansel LO, Eric Kihara SHONO
Life of this patent
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Abstract
Systems and methods of orifice driven hydroxyl combustion oxidation include introducing a first gas via at least a first orifice into a processing chamber having a substrate disposed on a substrate support. A second gas is introduced into the processing chamber via a plurality of second orifices. The plurality of second orifices are oriented substantially perpendicular to the at least a first orifice. A radical is produced as a function of the first gas and the second gas while heating the chamber.
Claims20
A process chamber for hydroxyl driven combustion, comprising:
- a substrate support;
- a plurality of orifices, wherein the plurality of orifices includes:
- at least a first orifice positioned along a first side of the chamber and oriented towards a first location of the chamber;
- and
- a plurality of second orifices positioned along a second side of the chamber and oriented towards the first location;
- wherein the plurality of second orifices is substantially perpendicular to the at least a first orifice;
- and
- a controller configured to:
- heat the processing chamber;
- inject a first gas from the at least a first orifice;
- inject a second gas from the plurality of second orifices;
- and
- produce a radical as a function of the heat, the first gas, and the second gas.
A method of hydroxyl driven combustion, comprising;
- introducing, via a controller, a first gas using at least a first orifice positioned along a first side of the chamber and oriented towards a first location of the chamber into the processing chamber;
- introducing, via the controller, a second gas into the processing chamber using a plurality of second orifices positioned along a second side of the chamber and oriented towards the first location, wherein the plurality of second orifices are oriented substantially perpendicular to the at least a first orifice such that the first gas and the second gas intersect in the first location;
- and
- producing a radical as a function of the first gas and the second gas while heating the chamber.
A computer readable medium configured to:
- introduce, via a controller, a first gas using at least a first orifice positioned along a first side of the chamber and oriented towards a first location of the chamber into the processing chamber;
- introduce, via the controller, a second gas into the processing chamber using a plurality of second orifices positioned along a second side of the chamber and oriented towards the first location, wherein the plurality of second orifices are oriented substantially perpendicular to the at least a first orifice such that the first gas and the second gas intersect in the first location;
- and
- produce a radical as a function of the first gas and the second gas while heating the chamber.
Dependencies are inferred from the claim text.