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US 2024/0344195 A1Published application
Coatings that contain fluorinated yttrium oxide and a metal oxide, and methods of preparing and using the coatings
AssigneeEntegris, Inc.
InventorsCarlo Waldfried, Stephen Longo
Life of this patent
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Abstract
Described are coatings that contain of fluorinated yttrium oxide and a metal oxide; methods of preparing these coatings; substrates, surfaces, equipment, and components of equipment that include a coating that contains a combination of fluorinated yttrium oxide and a metal oxide; and methods of preparing and using the coatings and coated substrates.
Claims16
A substrate comprising:
- a surface;
- and
- a composite coating deposited onto the surface, the composite coating comprising a mixture of at least two chemically distinct materials including yttrium oxide, fluorinated yttrium oxide, and zirconium oxide, wherein the composite coating does not exhibit distinct layers.
A semiconductor process tool comprising:
- a component having a surface;
- and
- a composite coating deposited onto the surface, the composite coating comprising a mixture of at least two chemically distinct materials including yttrium oxide, fluorinated yttrium oxide, and zirconium oxide, wherein the composite coating does not exhibit distinct layers.
A method comprising:
- placing a component having a surface into a deposition chamber;
- depositing yttrium oxide and zirconium oxide by atomic layer deposition, wherein the yttrium oxide and the zirconium oxide do not form distinct layers;
- and
- exposing the yttrium oxide and zirconium oxide to a molecular fluorine source vapor at a temperature of at least 300° C. to form a fluorinated yttrium oxide-metal oxide composite coating on the surface of the component, the fluorinated yttrium oxide-metal oxide composite coating comprising a mixture of at least two chemically distinct materials including yttrium oxide, fluorinated yttrium oxide, and zirconium oxide.
1 more element
Dependencies are inferred from the claim text.