Micromechanical component and scanning device
OwnerHelmut Grutzeck, Josip Mihaljevic +2inventors
InventorsHelmut Grutzeck, Josip Mihaljevic, Philipp Matthias Roming, Udo Hartel
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OwnerHelmut Grutzeck, Josip Mihaljevic +2inventors
InventorsHelmut Grutzeck, Josip Mihaljevic, Philipp Matthias Roming, Udo Hartel
Estimating the term…
A micromechanical component. The micromechanical component includes at least one adjustable part, a first holder for the adjustable part, and a first connecting structure. The first connecting structure is designed to connect the adjustable part to the first holder along a first axis of symmetry of the adjustable part, which runs perpendicular to an axis of rotation of the adjustable part. The micromechanical component further includes a first electrical conductor for detecting a breakage within the first connecting structure. The electrical conductor runs along the first connecting structure at least partially at an angle to the first axis of symmetry of the adjustable part.
A micromechanical component, comprising:
A microscanning device, comprising:
Dependencies are inferred from the claim text.