High temperature metal seals for vacuum segregation

A pressure seal comprising:

• a ring-shaped bottom portion having a cross-sectional width, a cross-sectional height, a bottom wall and a top wall defining a height of the ring-shaped bottom portion, the bottom wall having a bottom sealing surface;
• a compressible middle portion on the bottom portion, the compressible middle portion defining a ring shape and having a dynamic height extending from the top wall of the bottom portion to a top wall of the compressible middle portion;
• and
• a ring-shaped top portion on the middle portion, the ring-shaped top portion having walls extending from the top wall of the middle portion, the walls having an arc-shape extending from the top wall of the middle portion to a top end of the top portion and to an inner end of the walls of the top portion.

A processing chamber comprising:

• a chamber body having a top wall, a bottom wall and a sidewall containing an interior volume, the chamber body having a slit valve side and a pump port side;
• a pumping liner having a ring-shaped body, the ring-shaped body having a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface, the pumping liner aligned with the slit valve side;
• a pressure seal comprising:
• a bottom portion having a cross-sectional width, a cross-sectional height, a bottom wall and a top wall defining a height of the bottom portion, the bottom wall having a bottom sealing surface;
• a compressible middle portion on the bottom portion, the compressible middle portion having a dynamic height extending from the top wall of the bottom portion to a top wall of the middle portion;
• and
• a top portion on the middle portion, the top portion having walls extending from the top wall of the middle portion, the walls having an arc-shape extending from the top wall of the middle portion to a top end of the top portion and to an inner end of the walls of the top portion,
• an edge ring having an outer diameter surface positioned within the pumping liner so that there is a gap between the outer diameter surface of the edge ring and the inner diameter surface of the pumping liner, wherein the pressure seal is positioned in the gap between the outer diameter surface of the edge ring and the inner diameter surface of the pumping liner to isolate a lower portion of the chamber body.