Magnetic bearing device and vacuum pump
AssigneeEdwards Japan Limited
InventorTakaaki Ono
Life of this patent
Estimating the term…
Abstract
A magnetic bearing device and a vacuum pump configured to recover from an abnormal state, such as oscillation in a magnetic bearing levitation system with low false detection of abnormalities. The magnetic bearing device includes a magnetic bearing controller that controls the magnetic bearing, and detects an abnormality of control by the magnetic bearing controller and configured to correct control parameters while continuing an operation of the magnetic bearing device. The device also detects abnormality of the control by the magnetic bearing controller based on an abnormality condition having a larger degree of abnormality than the first abnormality condition, and a stopping means for stopping the operation of the magnetic bearing device.
Claims17
A magnetic bearing device, comprising:
- a rotating body;
- a magnetic bearing that magnetically supports the rotating body in a floating manner in air;
- and
- a magnetic bearing controller that controls the magnetic bearing,
- the magnetic bearing device further comprising:
- a first abnormality detection means for detecting an abnormality of control by the magnetic bearing controller on a basis of a predetermined first abnormality condition;
- a control parameter correction means for correcting a control parameter of the magnetic bearing controller while continuing an operation of the magnetic bearing device when the first abnormality detection means detects the abnormality of the control;
- a second abnormality detection means for detecting the abnormality of the control by the magnetic bearing controller on a basis of a predetermined second abnormality condition having a larger degree of abnormality than the first abnormality condition;
- and
- a stopping means for stopping the operation of the magnetic bearing device when the second abnormality detection means detects the abnormality of the control.
A magnetic bearing device, comprising:
- a rotating body;
- a magnetic bearing that magnetically supports the rotating body in a floating manner in air;
- and
- a magnetic bearing controller that controls the magnetic bearing,
- the magnetic bearing device further comprising:
- an abnormality detection means for detecting an abnormality of control by the magnetic bearing controller on the basis of a predetermined abnormality condition;
- a control parameter correction means for correcting a control parameter of the magnetic bearing controller;
- a predetermined range of areas that are set including any point on a time axis, a revolution speed axis, or a frequency axis where the control parameter correction means corrects the control parameter;
- and
- a mitigating means for mitigating the predetermined abnormality condition in the predetermined range of areas.
Dependencies are inferred from the claim text.