Homing methods for lift assemblies, and related apparatus and components, for substrate processing chambers

A lift assembly for disposition in relation to a substrate processing chamber, the lift assembly comprising:

• a first motor;
• a first drive assembly coupled to the first motor;
• a first support block coupled to the first drive assembly, the first motor configured to linearly move the first support block using the first drive assembly;
• a second motor;
• a second drive assembly coupled to the second motor;
• a second support block coupled to the second drive assembly, the second motor configured to linearly move the second support block using the second drive assembly, the second motor configured to linearly move the second support block independently of the first motor linearly moving the first support block;
• and
• a controller in communication with the first motor and the second motor, the controller comprising instructions that, when executed by a processor, cause a plurality of operations to be conducted, the plurality of operations comprising:
• detecting a fault condition,
• determining a first position of the first support block along a first movement range,
• determining a second position of the second support block along a second movement range, the second movement range overlapping with the first movement range by an overlap range,
• determining if the first position is in an inside condition or an outside condition, the inside condition is within the overlap range, and the outside condition is outside of the overlap range, and
• moving the first support block and the second support block respectively to a first retracted position and a second retracted position.

A method of transferring substrates, comprising:

• moving a first substrate into a chamber;
• raising a second support frame relative to a first support frame to engage the first substrate, the first support frame comprising a first shaft and a plurality of first arms, and the second support frame comprising a second shaft and a plurality of second arms;
• lowering the second support frame relative to the first support frame to land the first substrate on a first substrate support;
• detecting a fault condition;
• determining a first position of the first support frame along a first movement range;
• determining a second position of the second support frame along a second movement range, the second movement range overlapping with the first movement range by an overlap range;
• determining if the first position is in an inside condition or an outside condition, the inside condition is within the overlap range, and the outside condition is outside of the overlap range;
• and
• lowering the first support frame and the second support frame respectively to a first retracted position and a second retracted position.