Back to results
US 2024/0321567 A1Published application
Excimer lamp and uv irradiation unit including the same
AssigneeORC Manufacturing Co., Ltd.
InventorsGo KOBAYASHI, Izumi SERIZAWA, Shunya MATSUSHIMA
Life of this patent
Estimating the term…
Abstract
An excimer lamp includes a discharge tube, a band-shaped foil electrode provided in the discharge tube, and a dielectric configured to cover the foil electrode and maintain close contact with the foil electrode. The foil electrode extends along the axis of said discharge tube. The opposite sides of the foil electrode are flattened along the width direction of the foil electrode. Both edge portions of the foil electrode are pointed.
Claims19
An excimer lamp comprising:
- a discharge tube;
- a band-shaped foil electrode provided in said discharge tube, said foil electrode extending along the axis of said discharge tube;
- and
- a dielectric configured to cover said foil electrode and maintain close contact with said foil electrode,
- the opposite sides of said foil electrode being flattened along the width direction of said foil electrode, both edge portions of said foil electrode being pointed.
2 more elements
A UV (Ultraviolet) irradiation unit comprising:
- an excimer lamp;
- and
- an electric power supplier configured to supply electric power to said excimer lamp,
- said excimer lamp comprising:
- a discharge tube;
- a band-shaped foil electrode provided in said discharge tube, said foil electrode extending along the axis of said discharge tube;
- and
- a dielectric configured to cover said foil electrode and maintain close contact with said foil electrode,
- the opposite sides of said foil electrode being flattened along the width direction of said foil electrode, both edge portions of said foil electrode being pointed.
6 more elements
Dependencies are inferred from the claim text.