Mechatronic curtain for a process chamber for carrying out thermal processes in the manufacture of electronic assemblies
OwnerPaul WILDinventor
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OwnerPaul WILDinventor
Estimating the term…
The invention relates to a process chamber (10) for carrying out thermal processes in the manufacture of an electronic assembly (30), comprising the following: at least one opening (20) for introducing and/or removing the electronic assembly (30); a device (40) for supplying a gas; a controllable protection device (50) which is arranged on the opening (20) in order to reduce a leakage of gas from the process chamber, wherein the controllable protection device (50) comprises a first movable element (50A) as an integral piece which covers the width between the total width of the opening and the width of the electronic assembly; a device for detecting data relating to the dimensions of the electronic assembly (30); and a controller (60) which can control the protection device (50) on the basis of the data relating to the dimensions of the electronic assembly (30) such that when the electronic assembly (30) passes through the opening (20), a defined spacing is constantly maintained between the electronic assembly and the first movable element (50A).
Process chamber for carrying out thermal processes in the manufacture of an electronic assembly, comprising:
An electronic assembly process chamber comprising:
Dependencies are inferred from the claim text.