Hybrid electrochemical and abrasive fluid polishing

Abstract

A method of performing hybrid electrochemical and abrasive fluid polishing is provided. The method comprised disposing (202) a workpiece to be polished and a cathode in a flow of polishing fluid, wherein the polishing fluid comprises at least one electrolyte and at least one abrasive medium. The method further comprises connecting (204) the workpiece and the cathode to an electrical power supply. An apparatus (100) is also provided for hybrid electrochemical and abrasive fluid polishing. The apparatus comprises a vessel (102) comprising an inlet (103a) and an outlet (103b) to allow a flow of fluid through the vessel. The apparatus further comprises one or more mounts (104) configured to hold a workpiece (108) to be polished in the vessel between the inlet and the outlet. The apparatus also comprises one or more connectors (106) configured to connect the workpiece and a cathode (110) to an electrical power supply.

Dependencies are inferred from the claim text.