Back to results
US 2024/0290576 A1Published application
Ion beam extraction electrode, ion source and extraction electrode structure
AssigneeNissin Ion Equipment Co., Ltd.
InventorsYuya HIRAI, Weijang ZHAO
Life of this patent
Estimating the term…
Abstract
An ion beam extraction electrode includes a first member including a first beam passage hole through which an ion beam passes, a second member positioned opposite the first member and including a second beam passage hole through which the ion beam passes, a heater partially or fully disposed between the first member and the second member, and a gas shutoff member that blocks a flow of a gas from entering a space between the first member and the second member.
Claims19
An ion beam extraction electrode comprising:
- a first member including a first beam passage hole through which an ion beam passes,
- a second member positioned opposite the first member and including a second beam passage hole through which the ion beam passes,
- a heater at least partially disposed between the first member and the second member;
- and
- a gas shutoff member that blocks a flow of a gas from entering a space between the first member and the second member.
2 more elements
An ion beam extraction electrode comprising:
- a first member including a first beam passage hole through which an ion beam passes,
- a second member positioned opposite the first member and including a second beam passage hole through which the ion beam passes, the first member and the second member defining a space therebetween;
- and
- a heater disposed in the space,
- wherein the heater contacts at least a portion of the first member.
2 more elements
An ion beam extraction electrode comprising:
- a first member including a first beam passage hole through which an ion beam passes,
- a second member positioned opposite the first member and including a second beam passage hole through which the ion beam passes,
- means for heating at least one of the first member and the second member and for blocking a flow of gas from entering a space between the first member and the second member.
Dependencies are inferred from the claim text.