Information processing apparatus and storage medium

An information processing apparatus comprising:

• a processor configured to perform processing of determining a plurality of sample shot regions from a plurality of shot regions on a substrate;
• and
• a display controller configured to control display of a user interface screen,
• wherein the processor is configured to
• acquire the number of sample shot regions designated by a user, and
• determine the acquired number of sample shot regions using a second regression model formed by some terms of a plurality of terms forming a first regression model, and
• the display controller is configured to display, on the user interface screen, information of the determined sample shot regions and information of a polynomial forming the second regression model.

A computer-readable storage medium storing a program, the program including a program code for causing a computer to function as:

• a processor configured to determine, using a first regression model formed by a plurality of terms, a plurality of sample shot regions from a plurality of shot regions on a substrate;
• and
• a display controller configured to perform display control so that information of the plurality of sample shot regions determined by the processor is displayed on a user interface screen,
• wherein the processor is configured to redetermine a plurality of sample shot regions using a second regression model formed by some terms of the plurality of terms, and
• the display controller is configured to update display of the user interface screen so that information of the plurality of sample shot regions redetermined by the processor is displayed on the user interface screen.

A computer-readable storage medium storing a program, the program including a program code for causing a computer to function as:

• a processor configured to perform processing of determining a plurality of sample shot regions from a plurality of shot regions on a substrate;
• and
• a display controller configured to control display of a user interface screen,
• wherein the processor is configured to
• acquire the number of sample shot regions designated by a user, and
• determine the acquired number of sample shot regions using a second regression model formed by some terms of a plurality of terms forming a first regression model, and
• the display controller is configured to display, on the user interface screen, information of the determined sample shot regions and information of a polynomial forming the second regression model.