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US 2024/0271871 A1Published application
Monitoring a flame treatment device
AssigneeSingulus Technologies AG
InventorsGiani BRECHTL, Edgar RÜTH, Felix RÜBSAM, Kathrin HÖPFNER
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Abstract
The present invention relates very generally to the monitoring of a flame treatment device and in particular to a substrate treatment system having a flame treatment device and first and second substrate monitoring units.
Claims21
A substrate treatment system comprising:
- a flame treatment device for flame treating substrates, comprising a flame zone;
- a transport device for transporting a substrate carrier with substrates through the flame treatment device;
- a first substrate monitoring unit, which is suited to monitor the movement of the substrate carrier through the flame treatment device with respect to its transport speed and/or its dwell time in the flame zone;
- a second substrate monitoring unit, which is suited to monitor the substrates in the substrate carrier with respect to their temperature after they exit the flame zone;
- and
- a control unit,
- which is suited to switch off the flame treatment device when the first substrate monitoring unit detects too low a transport speed and/or too long a dwell time of a substrate carrier in the flame zone, and
- which is suited to stop the transport of the substrate carriers through the flame treatment device when the second substrate monitoring unit detects that the temperature of a substrate is too high.
5 more elements
Dependencies are inferred from the claim text.