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US 2024/0266475 A1Published application
Light emitting element, method of manufacturing the same, and display device including the light emitting element
AssigneeSamsung Display Co., Ltd.
InventorsJun Bo SIM, Chang Hee LEE, Yun Hyuk KO, Sang Ho JEON, Jae Kook HA
Life of this patent
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Abstract
A light emitting element includes: a light emitting stack pattern including a first semiconductor layer, an active layer, and a second semiconductor layer that are sequentially stacked along one direction; and an insulating film surrounding an outer surface of at least one of the first semiconductor layer, the active layer, and the second semiconductor layer. The insulating film including a zinc oxide (ZnO) thin film layer.
Claims3
A method of manufacturing a light emitting element, the method comprising:
- forming a light emitting stack structure by sequentially stacking a first semiconductor layer, an active layer, a second semiconductor layer, and an additional electrode on a substrate;
- forming at least one light emitting stack pattern by etching the light emitting stack structure in a vertical direction, and exposing one region of the first semiconductor layer to the outside;
- coating an insulating material layer made of a zinc acetate solution on the light emitting stack pattern by using a wet chemical process and drying the coated insulating material layer;
- forming an insulating film surrounding an outer surface of the light emitting stack pattern by etching the dried insulating material layer in the vertical direction;
- and
- forming the light emitting element by separating the light emitting stack pattern surrounded by the insulating film from the substrate.
3 more elements
Dependencies are inferred from the claim text.