Package structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hao Chen, Po-Yuan Cheng, Pu Wang, Li-Hui Cheng, Szu-Wei Lu
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Hao Chen, Po-Yuan Cheng, Pu Wang, Li-Hui Cheng, Szu-Wei Lu
Estimating the term…
A manufacturing method of a package structure includes: forming a first package component over a temporary carrier, wherein the first package component comprises a semiconductor die encapsulated by an insulating encapsulation material that comprises a base layer and a plurality of fillers inside the base layer; de-bonding the temporary carrier to expose a rear side of the semiconductor die, wherein during the de-bonding, a portion of the fillers is accessibly revealed from the base layer to form an insulating encapsulation; forming a metallic layer on the rear side of the semiconductor die and the portion of the fillers of the insulating encapsulation; and coupling a heat dissipating component to the first package component at least through the metallic layer.
A manufacturing method of a package structure, comprising:
A manufacturing method of a package structure, comprising:
A manufacturing method of a package structure, comprising:
Dependencies are inferred from the claim text.