Package structure and manufacturing method thereof

Abstract

The embodiments of the disclosure provides a package structure and a manufacturing method thereof, the package structure includes: a die, including a substrate and a device layer, wherein the substrate has a front side and a back side opposite to each other in a first direction perpendicular to a main surface of the die, and the device layer is at the front side of the substrate; a thermal interface material layer, on the back side of the substrate; and a thermal dissipation component, attached to the die through the thermal interface material layer, the die further includes at least one of a heat dissipation filling structure and a substrate recess, the heat dissipation filling structure is embedded in the substrate and has an exposed part exposed at a sidewall of the substrate; the substrate recess is recessed from the back side of the substrate towards the device layer.

Dependencies are inferred from the claim text.