Gas sampling apparatus for a physical vapor transport system
AssigneeCVD Equipment Corporation
InventorMaxim S. Shatalov
Life of this patent
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Abstract
Systems for providing a gas sample from a physical vapor transport system include a sampling tube with a first end connected to a crucible retort of the physical vapor transport system to sample a gas phase. The systems include a heater around at least a part of the sampling tube to maintain a temperature within the sampling tube. The sampling tube is integrated with an orifice and a skimmer with a skimmer divergent nozzle. An output of the skimmer is connected to a gas analyzer. An output of the sampling tube is connected to a differential pumping port.
Claims20
A system for providing a gas sample from a physical vapor transport system, the system comprising:
- a sampling tube with a first end connected to a crucible retort of the physical vapor transport system to sample a gas phase;
- and
- a heater around at least a part of the sampling tube to maintain a temperature within the sampling tube,
- wherein the sampling tube is integrated with an orifice and a skimmer with a skimmer divergent nozzle, an output of the skimmer is connected to a gas analyzer, and an output of the sampling tube is connected to a differential pumping port.
A device for providing a gas sample from a physical vapor transport system, the device comprising:
- a sampling tube integrated with an orifice and a skimmer with a skimmer divergent nozzle;
- and
- a heater around at least a part of the sampling tube to maintain a temperature within the sampling tube,
- wherein a first end of the sampling tube is connected to a crucible retort of the physical vapor transport system to sample a gas phase, an output of the skimmer is connected to a gas analyzer, and an output of the sampling tube is connected to a differential pumping port.
A method for providing a gas sample from a physical vapor transport system, the method comprising:
- sampling gas from a gas phase of a crucible retort of the physical vapor transport system by a sampling tube integrated with an orifice and a skimmer with a skimmer divergent nozzle, wherein a first end of the sampling tube is connected to the crucible retort of the physical vapor transport system, an output of the skimmer is connected to a gas analyzer, and an output of the sampling tube is connected to a differential pumping port;
- heating the sampling tube by a heater around at least a part of the sampling tube to maintain a temperature within the sampling tube;
- and
- providing the sampled gas to the gas analyzer.
Dependencies are inferred from the claim text.