Phosphonium Based Polymers And Copolymers As Additives For Chemical Mechanical Planarization Slurries

A cationic polymer or copolymer formed by at least one cationic monomer containing at least one phosphonium group, wherein the cationic monomer comprises a structure selected from the group consisting of:

• wherein:
• the at least one phosphonium group is in backbone of the cationic polymer or copolymer;
• R1 and R2 each is independently a substituted or unsubstituted aliphatic, branched aliphatic or cyclic aliphatic, aromatic or heteroaromatic moieties;
• wherein CH2 not in the aromatic or heteroaromatic ring can be replaced by O, S or N in a way that no heteroatoms are connected to each other;
• R3 is a substituted or unsubstituted aliphatic, branched aliphatic or cyclic aliphatic, aromatic, heteroaromatic, or siloxane moieties;
• wherein CH2 not in the aromatic or heteroaromatic ring can be replaced by O, S or N in a way that no heteroatoms are connected to each other;
• and hydrogen can be replaced by F, Cl or CN;
• anion X− is selected from the group consisting of a halide anion selected from the group consisting of F−, Cl−, Br−, and I−;
• BF4−;
• PF6−;
• carboxylate RCOO− with R═H, alkyl or aryl;
• malonate;
• citrate;
• fumarate;
• sulfonate RSO3 with R═H, alkyl or aryl;
• CF3COO−;
• CF3SO3−;
• nitrate;
• sulfate;
• carbonate;
• and hydrogen carbonate;
• wherein:
• the at least one phosphonium group is in a side chain or side chains of the cationic polymer or copolymer;
• Sp denotes at each occurrence a spacer or a single bond which chemically links the at least one phosphonium group to backbone of the cationic polymer or copolymer;
• wherein the spacer is a substituted or unsubstituted alkyl chain having 1 to 20, preferably 1 to 10 carbon atoms and is optionally mono- or polysubstituted by F, Cl, Br, I or CN;
• wherein one or more non-adjacent CH2 groups each can be independently replaced by —O—, —S—, —NH—, —NR— in a way that no heteroatoms are connected to each other;
• Pol denotes backbone of the cationic polymer or copolymer and the backbone type is selected from the group consisting of vinyl, styrene, acrylic or methacrylic, acrylamide, methacrylamide, ethylene glycol, vinyl ether, siloxane, phenol, norbornene type backbone, and combinations thereof;
• R1, R2, R3 each is independently a substituted or unsubstituted aliphatic, branched aliphatic or cyclic aliphatic, aromatic or heteroaromatic moieties;
• wherein CH2 not in the aromatic or heteroaromatic ring can be replaced by O, S or N in a way that no heteroatoms are connected to each other;
• and hydrogen can be replaced by F, C or CN;
• and
• anion X− is selected from the group consisting of a halide anion selected from the group consisting of F−, C−, Br−, and I−;
• BF4−;
• PF6−;
• carboxylate RCOO− with R═H, alkyl or aryl;
• malonate;
• citrate;
• fumarate;
• sulfonate RSO3 with R═H, alkyl or aryl;
• CF3COO−;
• CF3SO3−;
• nitrate;
• sulfate;
• carbonate;
• and hydrogen carbonate;
• and
• (3) combinations of (1) and (2).