Drive element
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorTakami ISHIDA
Life of this patent
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Abstract
A drive element is a drive element for rotating a movable part about a rotation axis, the drive element including: a fixation part rotatably supporting the movable part; and a drive part configured to rotate the movable part, wherein the drive part includes a piezoelectric layer, an upper electrode and a lower electrode placed with the piezoelectric layer interposed therebetween, and an insulating layer covering the piezoelectric layer, the upper electrode, and the lower electrode, and a wiring part composed of a single conductive layer connected to the upper electrode via a contact hole formed in the insulating layer is installed up to the fixation part.
Claims14
A drive element for rotating a movable part about a rotation axis, the drive element comprising:
- a fixation part rotatably supporting the movable part;
- and
- a drive part configured to rotate the movable part, wherein
- the drive part includes
- a piezoelectric layer,
- an upper electrode and a lower electrode placed with the piezoelectric layer interposed therebetween, and
- an insulating layer covering the piezoelectric layer, the upper electrode, and the lower electrode, and
- a wiring part composed of a single conductive layer connected to the upper electrode via a contact hole formed in the insulating layer is installed up to the fixation part.
Dependencies are inferred from the claim text.