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US 2024/0258440 A1Published application
Multilayer antireflection coatings on textured surface for back illuminated silicon photomultiplier
AssigneeGeorgia Tech Research Corporation
InventorsYuguo Tao, Anna S. Erickson
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Abstract
An exemplary embodiment of the present disclosure provides a photomultiplier, comprising a silicon substrate, a first antireflective layer, and a second antireflective layer. The silicon substrate can have a top surface. The first anti-reflective layer can be disposed on the top surface of the silicon substrate. The second anti-reflective layer can be disposed on top of the first anti-reflective layer.
Claims20
A back-illuminated photomultiplier, comprising:
- a silicon substrate having a top surface;
- a first anti-reflective layer disposed on the top surface of the silicon substrate;
- and
- a second anti-reflective layer disposed on a top surface of the first anti-reflective layer.
1 more element
A back-illuminated photomultiplier, comprising:
- a silicon substrate having a top surface, the top surface comprising a plurality of non-uniform protrusions;
- and
- a first anti-reflective layer disposed on the top surface of the silicon substrate.
Dependencies are inferred from the claim text.