Gate structures and semiconductor devices including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyojung NOH, Sungnam LYU, Byounghoon LEE, Jangeun LEE, Eulji JEONG
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AssigneeSamsung Electronics Co., Ltd.
InventorsHyojung NOH, Sungnam LYU, Byounghoon LEE, Jangeun LEE, Eulji JEONG
Estimating the term…
A gate structure includes a first conductive pattern including a first metal or a first metal compound and being doped with a second metal or silicon; a second conductive pattern on the first conductive pattern, the second conductive pattern including a third metal; and a gate insulation pattern covering a lower surface and a sidewall of the first conductive pattern and a sidewall of the second conductive pattern; wherein a work function of the second metal is smaller than a work function of the first metal and is smaller than a work function of the first metal compound.
A gate structure, comprising:
A gate structure, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.