Bonded body comprising mosaic diamond wafer and semiconductor of different type, method for producing same, and mosaic diamond wafer for use in bonded body with semiconductor of different type
AssigneesNational Institute of Advanced Industrial Science and Technology, Mitsubishi Electric Corporation
InventorsHideaki YAMADA, Akiyoshi CHAYAHARA, Yoshiaki MOKUNO, Takashi MATSUMAE, Yuuichi KURASHIMA, Eiji HIGURASHI, Hideki TAKAGI, Shuichi HIZA, Ken IMAMURA, Yusuke SHIRAYANAGI, Koji YOSHITSUGU, Kunihiko NISHIMURA
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