Method for manufacturing electronic device
AssigneeMitsui Chemicals Tohcello, Inc.
InventorsHiroto YASUI, Hiroyoshi KURIHARA, Jin KINOSHITA
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AssigneeMitsui Chemicals Tohcello, Inc.
InventorsHiroto YASUI, Hiroyoshi KURIHARA, Jin KINOSHITA
Estimating the term…
A method for manufacturing an electronic device at least includes a step (A) of preparing a structure which includes a wafer including a circuit forming surface, and an adhesive film bonded to the circuit forming surface side of the wafer, a step (B) of back-grinding a surface of the wafer on a side opposite to the circuit forming surface side; and a step (C) of removing the adhesive film from the wafer after the adhesive film is irradiated with an ultraviolet ray. The adhesive film includes a base material layer, and an ultraviolet curable adhesive resin layer provided on one surface side of the base material layer using an ultraviolet curable adhesive resin material. In addition, a loss tangent tan δ at −5° C. of a cured film of the ultraviolet curable adhesive resin material is 0.25 to 0.85.
A method for manufacturing an electronic device, the method at least comprising:
Dependencies are inferred from the claim text.