Electronic component cleaning apparatus

An electronic component cleaning apparatus for cleaning a surface of an electronic component, comprising:

• a wet cleaning unit that performs wet cleaning of the surface of the electronic component with liquid;
• a dry cleaning unit that performs dry cleaning of the surface of the electronic component with atmospheric pressure plasma;
• a transport unit that transports the electronic component between the wet cleaning unit and the dry cleaning unit;
• and
• a control unit that adjusts operations of the wet cleaning unit, the dry cleaning unit, and the transport unit,
• wherein the control unit;
• performs the wet cleaning of the surface of the electronic component with liquid by the wet cleaning unit;
• transports the electronic component that has been wet-cleaned by the transport unit to the dry cleaning unit;
• performs the dry cleaning of the surface of the electronic component with atmospheric pressure plasma by the dry cleaning unit;
• transports the electronic component that has been dry-cleaned by the transport unit to the wet cleaning unit;
• and
• performs a hydrogen water treatment by the wet cleaning unit to hydrophilize the surface of the electronic component using hydrogen water in which hydrogen gas is dissolved in water.