Excimer lamp
AssigneeExcelitas Technologies Corp.
InventorRudi Blondia
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Abstract
The techniques described herein relate to excimer lamps. An example excimer lamp includes a dielectric forming at least one side of a sealed cavity, an electrode array disposed over a surface of the dielectric, the electrode array comprising a plurality of electrodes of alternating polarity disposed at respective positions across at least one dimension of the excimer lamp, and a gas within the sealed cavity, the gas being capable of emitting ultraviolet light in response to excitation of the electrode array.
Claims28
An excimer lamp, comprising:
- a dielectric forming at least one side of a sealed cavity;
- an electrode array disposed over a surface of the dielectric, the electrode array comprising a plurality of electrodes of alternating polarity disposed at respective positions across at least one dimension of the excimer lamp;
- and
- a gas within the sealed cavity, the gas being capable of emitting ultraviolet light in response to excitation of the electrode array.
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6-8. (canceled)
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19-26. (canceled)
28-31. (canceled)
An excimer lamp system, comprising:
- a lamp comprising a dielectric forming at least one side of a sealed cavity;
- an electrode array disposed over a surface of the dielectric, the electrode array comprising a plurality of electrodes of alternating polarity disposed at respective positions across at least one dimension of the lamp;
- a window;
- and
- a gas within the sealed cavity, the gas being capable of emitting ultraviolet light through the window in response to excitation of the electrode array.
37-39. (canceled)
A method of operating an excimer lamp comprising a dielectric forming at least one side of a sealed cavity and an electrode array disposed over a surface of the dielectric, the electrode array comprising a plurality of electrodes disposed at respective positions across at least one dimension of the excimer lamp, the excimer lamp further comprising a gas within the sealed cavity, the gas being capable of emitting ultraviolet light in response to excitation of the electrode array, the method comprising:
- driving adjacent electrodes of the plurality of electrodes with voltages of alternating polarity.
42-60. (canceled)
Dependencies are inferred from the claim text.