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US 2024/0258073 A1Published application
Impedance transformation in radio-frequency-assisted plasma generation
AssigneeLam Research Corporation
InventorsEller Y. Juco, Thomas Lee Frederick, Karl Frederick Leeser, Paul Konkola
Life of this patent
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Abstract
An apparatus for providing signals to a device may include one or more radiofrequency signal generators, and electrically-small transmission line, which couples signals from the one or more RF signal generators to the fabrication chamber. The apparatus may additionally include a reactive circuit to transform impedance of the electrically-small transmission line from a region of relatively high impedance-sensitivity to region of relatively low impedance-sensitivity.
Claims12
An apparatus for providing signals to a device, comprising:
- one or more electrically-small transmission lines to couple signals from one or more RF signal generators to a fabrication chamber;
- and
- a reactive circuit to transform impedance of each of the one or more electrically-small transmission lines from a region having a first impedance-sensitivity to a region having a second impedance-sensitivity.
Dependencies are inferred from the claim text.