Bonding quality test method, bonding quality test circuit, and memory device including bonding quality test circuit
AssigneeSamsung Electronics Co., Ltd.
InventorSangsu Park
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorSangsu Park
Estimating the term…
A bonding quality test circuit includes a switching circuit configured to provide a connection between a sensing node and a bonding node, the bonding node corresponding to a first end of a bonding resistor that is between a line provided to a memory device and a peripheral circuit, a precharging circuit configured to provide a precharge voltage to the line and the sensing node when the precharging circuit is connected to the line and the sensing node by the switching circuit, a latch circuit that includes a first node configured to provide a control output signal to the precharging circuit and a second node configured to have a voltage that is phase inverted with respect to a voltage of the control output signal, and a first transistor configured to provide an output signal according to the sensing node when the first transistor is connected to the second node.
A bonding quality test circuit configured to test a bonding between a line provided to a memory device and a peripheral circuit that drives the memory device, the bonding quality test circuit comprising:
A memory device, comprising:
A method of testing bonding of layers of a memory device, the layers comprising a first semiconductor layer on which a memory cell is formed and a second semiconductor layer bonded to the first semiconductor layer by a bonding metal and on which a peripheral circuit for driving the memory cell is formed, the method comprising:
Dependencies are inferred from the claim text.