Gas sensor comprising carbon structure having high adsorption performance for gas and method for manufacturing the same
AssigneeHongik University Industry-Academia Cooperation Foundation
InventorJung Hwan SEO
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a gas sensor includes forming an electrode pattern; forming a carbide material layer on the electrode pattern; carbonizing, based on an irradiation of a laser on the carbide material layer, the carbide material layer to form a carbon structure capable of adsorbing gas particles; and electrically connecting a measurement device to the electrode pattern. The measurement device is configured to measure electrical properties of the electrode pattern. The gas sensor is capable of detecting hazardous materials such as nitrogen oxide.
Claims17
A method for manufacturing a gas sensor, comprising:
- forming an electrode pattern;
- forming a carbide material layer on the electrode pattern;
- carbonizing, based on an irradiation of a laser on the carbide material layer, the carbide material layer to form a carbon structure capable of adsorbing gas particles;
- and
- electrically connecting a measurement device to the electrode pattern, wherein, based on the carbon structure being exposed to the gas particles, the measurement device is configured to measure electrical properties of the electrode pattern.
A gas sensor, comprising:
- an electrode pattern;
- a carbon structure located on the electrode pattern, and having pores for adsorption of gas particles;
- and
- a measurement device electrically connected to the electrode pattern, and configured to detect the gas particles based on (i) measurement of a change in electrical properties of the electrode pattern and (ii) the carbon structure being exposed to the gas particles.
A method of operating a gas sensor, the method comprising:
- exposing a carbon structure that is located on an electrode pattern and has pores for adsorption of gas particles to gaseous phase materials including the gas particles for a first preset time;
- and
- measuring electrical properties of the electrode pattern after exposing to the gaseous phase materials.
Dependencies are inferred from the claim text.