Substrate processing apparatus

A substrate processing apparatus comprising:

• a processing module including a first sidewall and a second sidewall that are spaced apart in a first horizontal direction;
• and
• a substrate transfer device configured to transfer a substrate to the processing module, the substrate transfer device being disposed adjacent to the first sidewall,
• wherein the processing module includes a first processing container and a second processing container that are adjacent to each other in a second horizontal direction perpendicular to the first horizontal direction,
• wherein the second sidewall has a pair of second inclined portions disposed in a V-shape when viewed in a vertical direction, and a pair of second non-inclined portions, the pair of second inclined portions being disposed between the pair of second non-inclined portions,
• wherein a first maintenance opening is provided in one of the second inclined portions in the pair, the first maintenance opening being provided for performing maintenance on the first processing container,
• wherein a second maintenance opening is provided in another of the second inclined portions in the pair, the second maintenance opening being provided for performing maintenance on the second processing container,
• wherein the processing module includes a first maintenance door and a second maintenance door, the first maintenance door being configured to rotate horizontally to open and close the first maintenance opening, and the second maintenance door being configured to rotate horizontally to open and close the second maintenance opening,
• wherein a rotation trace of the first maintenance door overlaps a rotation trace of the second maintenance door when viewed in the vertical direction,
• wherein the first maintenance door includes a first hinge at a boundary between the one of the second inclined portions and one of the second non-inclined portions, and
• wherein the second maintenance door includes a second hinge at a boundary between the another of the second inclined portions and another of the second non-inclined portions.