Substrate holding device and substrate treating apparatus provided therewith

A substrate holding device that holds and rotates a substrate, the device comprising:

• a spin table that rotates in a horizontal plane;
• and
• three or more holders each having a base and a position regulator protruding upward from the base and regulating a horizontal position of the substrate on the spin table by contacting an outer periphery edge of the substrate, the three or more holders being arranged on an outer periphery of the spin table while being spaced apart from one another, wherein
• at least one holder of the three or more holders includes:
• a rotating base as the base that is rotatable around a longitudinal shaft axis;
• a rotating position regulator as the position regulator that protrudes toward the outer periphery edge of the substrate at a position apart from the shaft axis in plan view, and regulates the horizontal position of the substrate on the spin table by contacting the outer periphery edge of the substrate along with rotation of the rotating base;
• a rotating mechanism configured to rotate the rotating base to switch the rotating position regulator between a first condition in which the rotating position regulator contacts the outer periphery edge of the substrate to hold the substrate and a second condition in which the rotating position regulator is spaced apart from the outer periphery edge of the substrate to release the substrate;
• and
• a pushing member that is provided on the rotating base to protrude toward the outer periphery edge of the substrate, spaced apart from the substrate when the rotating position regulator is under the first condition, and configured to contact the outer periphery edge of the substrate to push the substrate in a direction apart from the position regulator when the rotating position regulator is switched from the first condition to the second condition.