Laser cleaning method, laser processing apparatus, and laser processing system
AssigneeKabushiki Kaisha Toshiba
InventorsYuta NAKAMOTO, Ryuichi TOGAWA
Life of this patent
Estimating the term…
Abstract
A laser cleaning process for removing a foreign matter from a processing portion of a base material includes: determining that the foreign matter is on the processing portion; determining a state of the foreign matter; determining whether the foreign matter can be removed from the processing portion; and removing from the processing portion the foreign matter that has been determined to be removable from the processing portion.
Claims13
A laser cleaning method for removing a foreign matter from a processing portion of a base material, comprising:
- determining that the foreign matter is on the processing portion;
- determining a state of the foreign matter;
- determining whether the foreign matter can be removed from the processing portion;
- and
- removing from the processing portion the foreign matter that has been determined to be removable from the processing portion.
A laser processing apparatus comprising:
- a processing head including a laser source and configured to direct laser from the laser to a base material;
- a camera positioned to capture an image of a processing portion of the base material;
- and
- a control circuit configured to control the processing head based on whether there is foreign matter is on the processing portion, as determined using the image captured by the camera.
A laser processing system comprising:
- a processing head including a laser source and configured to direct laser from the laser to a base material;
- a camera positioned to capture an image of a processing portion of the base material;
- and
- a control circuit configured to carry out a process including:
- determining that foreign matter is on the processing portion;
- determining a state of the foreign matter;
- determining whether the foreign matter can be removed from the processing portion;
- and
- controlling the processing head to remove from the processing portion the foreign matter that has been determined to be removable from the processing portion.
Dependencies are inferred from the claim text.