Systems and methods for supporting and conveying a substrate
AssigneeKateeva, Inc.
InventorsDigby Pun, Cormac McKinley Wicklow
Life of this patent
Estimating the term…
Loading patent…
AssigneeKateeva, Inc.
InventorsDigby Pun, Cormac McKinley Wicklow
Estimating the term…
A system may include a support surface for supporting a substrate, a plurality of first passages arranged to distribute flows of a first gas to establish a gas bearing to float the substrate above the support surface, and a plurality of second passages arranged to distribute flows of a second gas to convey the substrate along the support surface. A method may include floating a substrate above a support surface of a substrate support apparatus via a gas bearing; and while floating the substrate, conveying the substrate along the support surface by flowing gas toward a surface of the substrate and in a nonperpendicular direction relative to the surface of the substrate.
A system, comprising:
A system, comprising:
A system, comprising:
Dependencies are inferred from the claim text.