Overcurrent protection
AssigneeAtomica Corporation
InventorsSoheil Seena Partokia, Brian Maertz
Life of this patent
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Abstract
A microelectromechanical systems (MEMS) switch device including current sensing and overcurrent protection can include a movable plate movable between an open position and a closed position, wherein the moveable plate is moved by applying at least one or more of an electrostatic force and a magnetic force to move the movable plate. The movable plate can include a shunt operable to conduct current when the movable plate is the closed position. An inductive coil electronically coupled to the shunt can detect current conducted through the shunt.
Claims20
A microelectromechanical systems (MEMS) switch device, comprising:
- a movable plate movable between an open position and a closed position, wherein the MEMS switch device is activated by at least one or more of an electrostatic force and a magnetic force moving the movable plate;
- shunt operable to conduct current when the movable plate is the closed position;
- and
- an inductive coil electrically coupled to the shunt.
A method for current sensing in a microelectromechanical systems (MEMS) switch device, comprising:
- moving one or more movable plates from an open position to a closed position, wherein the moveable plate is moved by applying at least one or more of an electrostatic force and a magnetic force to move the one or more movable plates;
- conducting current through a shunt when the movable plate is the closed position;
- and
- detecting the current conducted through the shunt with an inductive coil electrically coupled to the shunt.
Dependencies are inferred from the claim text.