Plasma diagnostic apparatus and operating method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsHaewook PARK, Juhyun KIM, Younsok CHOI
Life of this patent
Estimating the term…
Abstract
A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.
Claims20
A plasma diagnostic apparatus comprising:
- a substrate having at least one probe;
- a plasma diagnostic circuit mounted on the substrate and configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information;
- a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device;
- and
- a battery mounted on the substrate and configured to supply a power to the plasma diagnostic circuit and to the wireless communication circuit.
A plasma diagnostic apparatus implemented in a wafer form and configured to include a processor, wherein the processor executes a program to perform the following operations:
- generating an electrical signal in a signal generator mounted on a substrate;
- applying the generated electrical signal to at least one probe;
- receiving the electrical signal from the at least one probe in a plasma diagnostic circuit mounted on the substrate;
- and
- analyzing the received electrical signal using at least one of coherent sampling or a window function in the plasma diagnostic circuit mounted on the substrate.
A plasma diagnostic apparatus comprising:
- a substrate implemented as a wafer;
- a plurality of probes on the substrate;
- and
- a plasma diagnostic circuit configured to receive an electrical signal corresponding to plasma of a chamber through each of the plurality of probes and to diagnose the electrical signal through at least one of coherent sampling or a window function.
Dependencies are inferred from the claim text.