Sensor assembly with a full-bridge pressure sensor

Abstract

A sensor assembly includes a substrate having a first outer surface and a second outer surface opposite the first outer surface, a first die attached to the first outer surface and having a first diaphragm, a second die attached to the second outer surface and having a second diaphragm, and a full-bridge pressure sensor including a plurality of piezoresistive elements. A first subset of at least two of the plurality of piezoresistive elements is disposed on the first diaphragm and a second subset of at least two of the plurality of piezoresistive elements is disposed on the second diaphragm.

Dependencies are inferred from the claim text.