Manufacturing device of display device

A manufacturing device of a display device, comprising:

• a preprocessing portion configured to perform preprocessing for a processing substrate;
• a conveyance mechanism configured to convey the processing substrate which passed through the processing portion;
• and
• first, second, third and fourth evaporation portions arranged in order in a conveyance direction of the processing substrate by the conveyance mechanism, wherein
• the first evaporation portion comprises an evaporation chamber for forming a first light emitting layer,
• the second evaporation portion comprises an evaporation chamber for forming an n-type charge generation layer and an evaporation chamber for forming a p-type charge generation layer,
• the third evaporation portion comprises an evaporation chamber for forming a second light emitting layer,
• the fourth evaporation portion comprises an evaporation chamber for forming an upper electrode, and
• the conveyance mechanism comprises:
• a first rail provided along the first evaporation portion;
• a second rail provided along the second evaporation portion;
• a third rail provided along the third evaporation portion;
• a fourth rail provided along the fourth evaporation portion;
• a first rotation chamber provided between the first rail and the second rail and between the third rail and the fourth rail and configured to rotate the processing substrate which passed through the first rail and convey the processing substrate to the fourth rail;
• a second rotation chamber configured to rotate the processing substrate which passed through the second rail and convey the processing substrate to the third rail;
• and
• a gate valve provided between the first rotation chamber and the third and fourth rails.