Three-dimensional memory devices and methods for forming the same
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsZongke Xu, Bin Yuan, Xiangning Wang, Qiangwei Zhang
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsZongke Xu, Bin Yuan, Xiangning Wang, Qiangwei Zhang
Estimating the term…
A three-dimensional (3D) memory device includes a staircase, a plurality of contacts, a plurality of groups of support structures, and a fourth support structure between adjacent groups of support structures through the staircase. The plurality of groups of support structures are arranged in a first direction. Each of the groups of support structures includes three support structures. Projections of the three support structures form a triangular shape in a plane parallel to the first direction. The plurality of contacts each is surrounded by a respective group. A projection of one of the contacts overlaps with the triangular shape of the respective group.
A three-dimensional (3D) memory device, comprising a staircase, a plurality of contacts, a plurality of groups of support structures, and a fourth support structure between adjacent groups of support structures through the staircase, wherein:
A three-dimensional (3D) memory device, comprising:
A method for forming a three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.