US 2024/0204697 A1 · APPARATUS AND METHOD FOR CONTACTLESS TRANSPORTATION OF A CARRIER

Abstract

An apparatus for contactless transportation of a carrier is provided. The apparatus includes the carrier, being a substrate carrier or a mask carrier. The apparatus includes a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier. The linear reluctance motor includes one or more linear stators defining a transportation track for the carrier. The linear reluctance motor includes a mover attached to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. The one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material. The apparatus includes a controller connected to the set of electromagnets.

Claims20

Dependent claims

A substrate carrier assembly, comprising:

a carrier configured to support a substrate;
and
a first mover coupled to the carrier, the first mover comprising:
a first set of poles extending in a first direction;
and
a second mover coupled to the carrier, the second mover comprising:
a second set of poles extending in the first direction, wherein:
each pole of the first set and the second set comprise a ferromagnetic material;
the first set is spaced apart in a second direction from the second set;
and
the first direction and the second direction are at a first angle to each other.

8 more elements

Dependencies are inferred from the claim text.

Apparatus and method for contactless transportation of a carrier

Life of this patent

Apparatus and method for contactless transportation of a carrier

Life of this patent

Abstract

Claims20