Silicon flexible connectors

A method comprising:

• providing a single piece of silicon material having metal traces disposed therein;
• depositing an electrically conductive material in vias formed in each end of the single piece of silicon material via a first etching process to form contacts that connect with the metal traces;
• forming slots in a connector section of the single piece of silicon material via a second etching process, the slots being defined between strands of the connector section;
• and
• etching via a third etching process a backside of an exposed portion of the connector section of the single piece of silicon material to form an opening such that the slots extend through the connector section to thereby release the strands.

A method comprising:

• providing a single piece of silicon material having metal traces disposed therein;
• depositing an electrically conductive material in vias formed in each end of the single piece of silicon material via a first etching process to form contacts that connect with the metal traces;
• forming slots in a portion of a connector section of the single piece of silicon material via a second etching process, the slots being defined between strands of the connector section;
• forming channels and integrated strands in a support structure area of the connector section via a third etching process, the channels being formed between the integrated strands;
• and
• etching via a fourth etching process a backside of an exposed portion of the connector section of the single piece of silicon material to form an opening such that the slots extend through the connector section to thereby release the strands and to form a support structure, the support structure comprised a base and the integrated strands attached to the base in the support structure area of the connector section.